Zobrazeno 1 - 10
of 76
pro vyhledávání: '"Sirse, Nishant"'
Using particle-in-cell (PIC) simulation technique, the effect of gas pressure (5-500 mTorr) on the plasma spatial asymmetry, ionization rate, metastable gas densities profile, electron energy distribution function and higher harmonics generation are
Externí odkaz:
http://arxiv.org/abs/2409.13396
Autor:
Singh, Pawandeep, Pandey, Avnish, Dahiya, Swati, Patil, Yashashri, Sirse, Nishant, Karkari, Shantanu
The dielectric constant of a sheath, whether ionic or electronic, formed around the cylindrical limbs of a hairpin probe, is often considered the same as that of a vacuum. However, this assumption does not hold true for electron sheaths and electron-
Externí odkaz:
http://arxiv.org/abs/2406.13497
Autor:
Dahiya, Swati, Sharma, Narayan, Geete, Shivani, Sharma, Sarveshwar, Sirse, Nishant, Karkari, Shantanu
In this study, we have investigated the production of negative ions by mixing electronegative oxygen gas with electropositive argon gas in a geometrically asymmetric cylindrical capacitively coupled radio frequency plasma discharge. The plasma parame
Externí odkaz:
http://arxiv.org/abs/2405.14412
Understanding electron and ion heating phenomenon in capacitively coupled radio-frequency plasma discharges is vital for many plasma processing applications. In this article, using particle-in-cell simulation technique we investigate the collisionles
Externí odkaz:
http://arxiv.org/abs/2309.08310
Autor:
Dahiya, Swati, Singh, Pawandeep, Patil, Yashashri, Sharma, Sarveshwar, Sirse, Nishant, Karkari, Shantanu Kumar
Publikováno v:
Phys. Plasmas 30, 093505 (2023)
We investigate the discharge characteristics of a low-pressure geometrically asymmetric cylindrical capacitively coupled plasma discharge with an axisymmetric magnetic field generating an EXB drift in the azimuthal direction. Vital discharge paramete
Externí odkaz:
http://arxiv.org/abs/2306.00594
Control over plasma asymmetry in a low-pressure capacitively coupled plasma (CCP) discharges is vital for many plasma processing applications. In this article, using the particle-in-cell simulation technique, we investigated the asymmetry generation
Externí odkaz:
http://arxiv.org/abs/2302.02409
Using particle-in-cell simulation technique, we investigate the plasma and ionization asymmetry, electron and ion energy distribution function in capacitive discharges excited by tailored waveforms. At a base frequency of 13.56 MHz, three different w
Externí odkaz:
http://arxiv.org/abs/2111.11740
Tailoring ion energy distribution function (IEDF) is vital for advanced plasma processing applications. Capacitively coupled plasma (CCP) discharges excited using non-sinusoidal waveform have shown its capability to control IEDF through generation of
Externí odkaz:
http://arxiv.org/abs/2106.14847
A particle-in-cell (PIC) simulation study is performed to investigate the discharge asymmetry, higher harmonic generations and electron heating mechanism in a low pressure very high frequency capacitively coupled plasma (CCP) excited by a saw-tooth l
Externí odkaz:
http://arxiv.org/abs/2007.09624
Very high frequency (VHF) driven capacitive discharges are now being increasingly adopted for plasma-based materials processing due to their high processing rates and lower substrate damage. Past studies related to complex plasma dynamics and higher
Externí odkaz:
http://arxiv.org/abs/2007.03252