Zobrazeno 1 - 10
of 29
pro vyhledávání: '"Sina Sadeghpour"'
Publikováno v:
Micro and Nano Engineering, Vol 19, Iss , Pp 100213- (2023)
In this paper, we are reporting low-cost piezo-MEMS speakers based on an SOI-free process. The speaker membrane is made of a 1.5 μm thick polyimide passive layer, obviating the need for SOI wafers. The custom-made PZT solution for depositing 1 μm s
Externí odkaz:
https://doaj.org/article/7dd058aee5e148eaa7010faeae62a923
Autor:
Chen Wang, Yuan Wang, Weidong Fang, Xiaoxiao Song, Aojie Quan, Michiel Gidts, Hemin Zhang, Huafeng Liu, Jian Bai, Sina Sadeghpour, Michael Kraft
Publikováno v:
Microsystems & Nanoengineering, Vol 8, Iss 1, Pp 1-14 (2022)
Abstract This paper describes a novel electrostatically actuated microgripper with freeform geometries designed by a genetic algorithm. This new semiautomated design methodology is capable of designing near-optimal MEMS devices that are robust to fab
Externí odkaz:
https://doaj.org/article/d8cab8f826ba48059360932e0738f627
Publikováno v:
Sensors, Vol 23, Iss 10, p 4826 (2023)
This paper presents a fully addressable 8 × 8 two-dimensional (2D) rigid piezoelectric micromachined ultrasonic transducer (PMUT) array. The PMUTs were fabricated on a standard silicon wafer, resulting in a low-cost solution for ultrasound imaging.
Externí odkaz:
https://doaj.org/article/e708158966d34812a064d6d8736ac15d
Autor:
Chen Wang, Fang Chen, Yuan Wang, Sina Sadeghpour, Chenxi Wang, Mathieu Baijot, Rui Esteves, Chun Zhao, Jian Bai, Huafeng Liu, Michael Kraft
Publikováno v:
Sensors, Vol 20, Iss 14, p 4054 (2020)
This paper reviews the research and development of micromachined accelerometers with a noise floor lower than 1 µg/√Hz. Firstly, the basic working principle of micromachined accelerometers is introduced. Then, different methods of reducing the noi
Externí odkaz:
https://doaj.org/article/a40c7f7c45704cfeb3ddb8fd28577ca7
Autor:
Sina Sadeghpour, Sebastian Meyers, Jean-Pierre Kruth, Jozef Vleugels, Michael Kraft, Robert Puers
Publikováno v:
Sensors, Vol 19, Iss 4, p 757 (2019)
This paper presents the design and fabrication process of a spherical-omnidirectional ultrasound transducer for underwater sensor network applications. The transducer is based on the vibration of two hemispheres with a thickness of 1 mm and an outer
Externí odkaz:
https://doaj.org/article/89b968226cc9419590acf1689821566a
Autor:
Sina Sadeghpour, Robert Puers
Publikováno v:
Proceedings, Vol 2, Iss 13, p 743 (2018)
This paper presents an optimized way of lead zirconate titanate (PZT) deposition in orderto selectively grow three different (100/001), (110), and (111) crystal orientation in two differentthickness ranges, thinner and thicker than 400 nm. The thickn
Externí odkaz:
https://doaj.org/article/e429866ae0ab4297881cfdcfaf8bd66d
Publikováno v:
Proceedings, Vol 1, Iss 4, p 364 (2017)
This paper presents an array of five aluminum nitride (AlN) based piezoelectric micromachined ultrasound transducers (pMUTs) with different dimensions operating at 540–2360 kHz in air. Due to the damping effect of water or oil on the vibration of e
Externí odkaz:
https://doaj.org/article/c49b3d87c64d463ab151a11493743d33
Publikováno v:
Proceedings, Vol 1, Iss 4, p 363 (2017)
This paper presents the design and fabrication procedure of a single-element omnidirectional piezoelectric ultrasound transducer, which can be utilized for under water communication. The transducer consists of a spherical silicon infiltrated silicon
Externí odkaz:
https://doaj.org/article/1c7ad986e3f2454a9e616f4da45b77e7
Publikováno v:
IEEE Open Journal of Ultrasonics, Ferroelectrics, and Frequency Control. 2:194-202
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::497efa8c9a99ea557e899e2ca29e3388
https://doi.org/10.1109/ojuffc.2022.3207128
https://doi.org/10.1109/ojuffc.2022.3207128
Publikováno v:
2023 IEEE 36th International Conference on Micro Electro Mechanical Systems (MEMS).
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::88f6572d9f0133e2228ca5ca0faf74e6
https://doi.org/10.1109/mems49605.2023.10052246
https://doi.org/10.1109/mems49605.2023.10052246