Zobrazeno 1 - 10
of 14
pro vyhledávání: '"Simone Giangrandi"'
Publikováno v:
ACS Omega, Vol 9, Iss 41, Pp 42386-42395 (2024)
Externí odkaz:
https://doaj.org/article/e2ce2dd1b30242f185692389fad6d101
Autor:
Luca Panariello, Maria-Beatrice Coltelli, Simone Giangrandi, María Carmen Garrigós, Ahdi Hadrich, Andrea Lazzeri, Patrizia Cinelli
Publikováno v:
Polymers; Volume 14; Issue 11; Pages: 2274
RUA. Repositorio Institucional de la Universidad de Alicante
Universidad de Alicante (UA)
RUA. Repositorio Institucional de la Universidad de Alicante
Universidad de Alicante (UA)
The paper tissue industry is a constantly evolving sector that supplies markets that require products with different specific properties. In order to meet the demand of functional properties, ensuring a green approach at the same time, research on bi
Autor:
Timo Sajavaara, André Vantomme, Simone Giangrandi, Bert Brijs, Kai Arstila, Wilfried Vandervorst
Publikováno v:
Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms. 267:1936-1941
Low-energy heavy-ion Elastic Recoil Detection Analysis (ERDA) is becoming a mature technique for high-resolution characterization of thin films, i.e. below 50 nm thickness. In combination with a small tandem accelerator (∼2 MV terminal voltage) and
Autor:
Bert Brijs, André Vantomme, Wilfried Vandervorst, Simone Giangrandi, Kai Arstila, Timo Sajavaara
Publikováno v:
Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms. 266:5144-5150
Low-energy heavy-ion time-of-flight elastic recoil detection analysis (TOF-ERDA) is becoming a mature technique for accurate characterization of thin films. In combination with a small tandem accelerator (∼2 MV terminal voltage) and beam energies b
Autor:
Timo Sajavaara, Simone Giangrandi, Bert Brijs, Kai Arstila, Wilfried Vandervorst, André Vantomme
Publikováno v:
Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms. 261:512-515
With the implementation of low-energy time-of-flight Elastic Recoil Detection Analysis (ERDA), routine analysis of thin films with high depth resolution becomes possible. The optimization of the measurement conditions is a key issue for an accurate s
Autor:
André Vantomme, Kai Arstila, Simone Giangrandi, Wilfried Vandervorst, Bert Brijs, Timo Sajavaara
Publikováno v:
Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms. 261:529-533
This paper describes a time-of-flight (TOF) spectrometer for Heavy-Ion Rutherford Backscattering Spectrometry (HI-RBS) recently installed at IMEC for thin film analysis. The TOF telescope allows the use of ion beams heavier than He, with advantages i
Autor:
Simone Giangrandi, Wilfried Vandervorst, André Vantomme, Timo Sajavaara, Bert Brijs, Kai Arstila
Publikováno v:
Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms. 249:292-296
The use of forward scattered heavy incident ions in combination with a time-of-flight-energy telescope provides a powerful tool for the analysis of very thin (5–30 nm) films. This is because of greater stopping powers and better detector energy res
Autor:
André Vantomme, Simone Giangrandi, Timo Sajavaara, Hugo Bender, Wilfried Vandervorst, Bert Brijs, Francesca Iacopi
Publikováno v:
Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms. 249:189-192
With the implementation of time-of-flight elastic recoil detection (ToF-ERD) for the analysis of thin films with high depth resolution using a standard ‘low-energy’ accelerator, routine application of ERD in semiconductor technology becomes possi
Autor:
Thierry Conard, Wilfried Vandervorst, Andreas Bergmaier, Günther Dollinger, Kuniko Kimura, Simone Giangrandi, Bert Brijs, Kai Arstila, Tom Janssens, André Vantomme, Timo Sajavaara, Kaoru Nakajima
Publikováno v:
Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms. 249:847-850
The analysis of thin films in the range of 10 nm and less has become very important in microelectronics. The goal of this article is an evaluation of low-energy TOF-ERDA (time-of-flight elastic recoil detection analysis) in comparison with low-energy
Autor:
Simone Giangrandi, Bert Brijs, Wilfried Vandervorst, Kai Arstila, André Vantomme, Timo Sajavaara
Publikováno v:
Microelectronic Engineering. 80:106-109
A low-energy Time of Flight Elastic Recoil Detection set-up has been developed for the characterization of ultrathin films, e.g. high and low k dielectrica. The performance is demonstrated by sample analysis of low k materials as they normally contai