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pro vyhledávání: '"Simon Kurin"'
Autor:
Dan Rost, Dax Olvera, Christophe Couderc, Ryan Gardner, Raunak Mann, Simon Kurin, Dana Bernstein
Publikováno v:
SPIE Proceedings.
Aerial image mask inspection tools are effective in qualifying masks based upon printability assessments using scanner-based actinic (193nm) illumination conditions. Aerial imaging inspection application is relevant for masks that are at final proces
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::f083c4a08c5fbc0dffe23cd9eff17da7
https://doi.org/10.1117/12.793096
https://doi.org/10.1117/12.793096
Publikováno v:
SPIE Proceedings.
The paper presents the results of a study to define a production-worthy inspection technique for subresolution solid and hollow scattering features used in 193-nm lithography. Masks are inspected using conventional high-NA and aerial-imaging-based ma
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::8d1792c44790cc75890c4cd072b29496
https://doi.org/10.1117/12.579749
https://doi.org/10.1117/12.579749