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pro vyhledávání: '"Simon Joshua Jacobs"'
Autor:
W.C. McDonald, Vincent C. Lopes, L.K. Magel, Seth A. Miller, Simon Joshua Jacobs, Malone Joshua
Publikováno v:
2002 IEEE International Reliability Physics Symposium. Proceedings. 40th Annual (Cat. No.02CH37320).
Exposure of operating MEMS structures to atmospheric gasses may have deleterious effects on device performance. Here we consider from a phenomenological point of view the effects that moisture has on both short- and long-term performance characterist
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::28d021ed559627e51a7c67ce634e6112
https://doi.org/10.1109/relphy.2002.996625
https://doi.org/10.1109/relphy.2002.996625
