Zobrazeno 1 - 9
of 9
pro vyhledávání: '"Simon Hesp"'
Autor:
Yiming Li, Simon Hesp
Publikováno v:
SSRN Electronic Journal.
Publikováno v:
SSRN Electronic Journal.
Autor:
Chanaka Nawarathna, Simon Hesp
Publikováno v:
SSRN Electronic Journal.
Publikováno v:
SSRN Electronic Journal.
Publikováno v:
Polymer. 33:1583-1588
Tetrahydropyranyl (TH) protected poly(p-hydroxystyrene) (PHS) was synthesized and its acid-catalysed thermal deprotection utilized in the design of an alkali developable, positive photoresist system incorporating chemical amplification. The solubilit
Publikováno v:
Journal of Applied Polymer Science. 42:877-883
Tetrahydropyranyl- (THP) and furanyl- (THF) protected polyhydroxystyrene (PHS) polymers have been investigated for their potential use in conjunction with onium salt acid precursors to yield high-sensitivity resist systems. The synthesized polymers h
Publikováno v:
Japanese Journal of Applied Physics. 28:2114
In order to understand the basic mechanisms working in the dissolution of novolak/dissolution inhibitor systems model compounds have been studied in terms of their dissolution inhibition capabilities. The influences of the structure of small size mol
Conference
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