Zobrazeno 1 - 7
of 7
pro vyhledávání: '"Silvio Gees"'
Optical frequency comb generation with low temperature reactive sputtered silicon nitride waveguides
Autor:
Andreas Frigg, Andreas Boes, Guanghui Ren, Thach G. Nguyen, Duk-Yong Choi, Silvio Gees, David Moss, Arnan Mitchell
Publikováno v:
APL Photonics, Vol 5, Iss 1, Pp 011302-011302-6 (2020)
Integrated silicon nitride (SiN) waveguides with anomalous dispersion have the potential to bring practical nonlinear optics to mainstream photonic integrated circuits. However, high-stress and high-processing temperatures remain an obstacle to mass
Externí odkaz:
https://doaj.org/article/6d352c10d7e746c787c9639a289e0e1e
Autor:
Arnan Mitchell, Andreas Boes, Guanghui Ren, Silvio Gees, Thach G. Nguyen, David J. Moss, Andreas Frigg, Duk-Yong Choi
Publikováno v:
Scopus-Elsevier
We demonstrate fully CMOS-compatible anomalous dispersive SiN microring resonators with an intrinsic Q factor of 6.6 × 105 based on reactive sputtering SiN, yielding in a 250 nm wide modulation-instability frequency comb.
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::1fadf3d181ba4eb4f33489be074f5dce
https://doi.org/10.1364/cleopr.2020.c2c_3
https://doi.org/10.1364/cleopr.2020.c2c_3
Publikováno v:
AOS Australian Conference on Optical Fibre Technology (ACOFT) and Australian Conference on Optics, Lasers, and Spectroscopy (ACOLS) 2019.
In this contribution, we demonstrate the deposition of low loss, CMOS-compatible SiN thin-films using plasma beam assisted reactive sputtering for photonic integrated circuits. Plasma beam assistance during the deposition process enabled us to achiev
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::11bbcc6b6f7233bac26f2d9164345ccc
https://doi.org/10.1117/12.2541269
https://doi.org/10.1117/12.2541269
Publikováno v:
Scopus-Elsevier
Silicon nitride (SiN) waveguides are a promising platform for nonlinear photonic devices, as it offers a large bandgap, low two-photon absorption, CMOS-compatible fabrication methods and a significant nonlinearity [1,2]. Prominent applications are op
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::a524d61ca87934f0eccce3aa555935b0
https://doi.org/10.1109/cleoe-eqec.2019.8873255
https://doi.org/10.1109/cleoe-eqec.2019.8873255
Optical frequency comb generation with low temperature reactive sputtered silicon nitride waveguides
Autor:
Duk-Yong Choi, Silvio Gees, Arnan Mitchell, Andreas Frigg, David J. Moss, Thach G. Nguyen, Guanghui Ren, Andreas Boes
Publikováno v:
APL Photonics, Vol 5, Iss 1, Pp 011302-011302-6 (2020)
Integrated silicon nitride (SiN) waveguides with anomalous dispersion have the potential to bring practical nonlinear optics to mainstream photonic integrated circuits. However, high-stress and high-processing temperatures remain an obstacle to mass
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::3148f5b601c9523762bf26661242542d
https://doi.org/10.1063/1.5136270
https://doi.org/10.1063/1.5136270
Publikováno v:
Optical Interference Coatings 2016.
In this novel approach the distribution of the sputtered flux is tailored by careful adjustment of the magnetic field intensity. Target usage is improved by rotating the disk shaped target. Uniformities
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::904dd5b9fa55529d0c6e3a7a7243238f
https://doi.org/10.1364/oic.2016.wa.2
https://doi.org/10.1364/oic.2016.wa.2
Publikováno v:
Optical Interference Coatings 2016.
We show a sputter system with an innovative combination of components which enables low cost of ownership, high volume and high yield production of demanding optical interference filters on thin glass wafers.
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::326fb3914520f3ff9a8e6d64513d455c
https://doi.org/10.1364/oic.2016.wa.7
https://doi.org/10.1364/oic.2016.wa.7