Zobrazeno 1 - 2
of 2
pro vyhledávání: '"Silvestr Vancik"'
Autor:
Silvestr Vancik, Ulrich Schmid, Jaromir Hubalek, Radim Hrdy, Michael Schneider, Jan Prasek, Patrik Fillner
Publikováno v:
2019 42nd International Spring Seminar on Electronics Technology (ISSE).
We presented the development and characterization of high-k stack HfO 2 /Al 2 O 3 capacitor, fabricated directly on chip. The capacitor is based on nanolaminate material directly grown by plasma-assisted Atomic Layer Deposition (ALD)in a single react
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::bc1fda800dcbc2357bedc03e25f663d1
https://doi.org/10.1109/isse.2019.8810156
https://doi.org/10.1109/isse.2019.8810156
Autor:
Vladimir Levek, Zdenek Pytlicek, Silvestr Vancik, Imrich Gablech, Vojtech Svatos, Jan Prasek, Jaroslav Klempa
Publikováno v:
2018 41st International Spring Seminar on Electronics Technology (ISSE).
In this paper, we design and develop low-power MEMS based microhotplates for chemiresistive gas sensors using computer modelling and microelectronic technologies, respectively. Two geometrical designs of supporting beams of suspended membranes were d
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::a327bb05fb7b91df0a0483d581ebde3f
https://doi.org/10.1109/isse.2018.8443768
https://doi.org/10.1109/isse.2018.8443768