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pro vyhledávání: '"Sihn, Wilfried"'
Autor:
Jalali, Anahid, Heistracher, Clemens, Schindler, Alexander, Haslhofer, Bernhard, Nemeth, Tanja, Glawar, Robert, Sihn, Wilfried, De Boer, Peter
Predicting unscheduled breakdowns of plasma etching equipment can reduce maintenance costs and production losses in the semiconductor industry. However, plasma etching is a complex procedure and it is hard to capture all relevant equipment properties
Externí odkaz:
http://arxiv.org/abs/1904.07686
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