Zobrazeno 1 - 3
of 3
pro vyhledávání: '"Siarhei Madveika"'
Publikováno v:
Acta Polytechnica, Vol 53, Iss 2 (2013)
At present, the research for finding new technical methods of treating materials with plasma, including the development of energy and resource saving technologies for microelectronic manufacturing, is particularly actual.In order to improve the effic
Externí odkaz:
https://doaj.org/article/91621d6dae7241f6aec29bec4ee967ff
Publikováno v:
Acta Polytechnica, Vol 53, Iss 2 (2013)
At present, the research for finding new technical methods of treating materials with plasma, including the development of energy and resource saving technologies for microelectronic manufacturing, is particularly actual.In order to improve the effic
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::d03c2968bbf23e5a3e7cf1c3a3e2464f
https://doi.org/10.14311/1725
https://doi.org/10.14311/1725
Publikováno v:
2012 13th International Conference on Optimization of Electrical and Electronic Equipment (OPTIM).
The investigation of the microwave energy penetration (f = 2,45 ± 0,05 GHz) in the center of the oxygen gas discharge in the resonant type plasmatron was carried out on the example of microwave plasma-chemical processing of silicon plates. The inves
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::48f6c913098d65aaeb37d3726e6a6f32
https://doi.org/10.1109/optim.2012.6231952
https://doi.org/10.1109/optim.2012.6231952