Zobrazeno 1 - 2
of 2
pro vyhledávání: '"Shyama Mukherjee"'
Publikováno v:
MRS Proceedings. 613
The present work describes the process principles of “Spin-Etch Planarization” (SEP), an emerging method of planarization of dual damascene copper interconnects. The process involves a uniform removal of copper and the planarization of surface to
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::a860458500b0d473e3ae1a485224f8e5
https://doi.org/10.1557/proc-613-e8.10.1
https://doi.org/10.1557/proc-613-e8.10.1
Publikováno v:
ECS Meeting Abstracts. :380-380
not Available.
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::9bbc2d6fa9369de1ce5a5860919c632d
https://doi.org/10.1149/ma2005-01/8/380
https://doi.org/10.1149/ma2005-01/8/380