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pro vyhledávání: '"Shuzhe Mei"'
Autor:
Shuzhe Mei, Quan Wang, Meilan Hao, Jiankai Xu, Haibo Yin, Hongling Xiao, Chun Feng, Lijuan Jiang, Xiaoliang Wang, Fengqi Liu, Xiangang Xu, Zhanguo Wang
Publikováno v:
AIP Advances, Vol 8, Iss 8, Pp 085114-085114-9 (2018)
The temperature uniformity and heating efficiency in a high-temperature epitaxial growth system were investigated by modeling and simulating. The finite element method (FEM) was used to calculate the distribution of magnetic field and temperature fie
Externí odkaz:
https://doaj.org/article/2543e2236e50401596e52e8ac43a1f6e