Zobrazeno 1 - 10
of 44
pro vyhledávání: '"Shunichi Yamanaka"'
Publikováno v:
Electronics and Communications in Japan (Part I: Communications). 65:106-112
To realize high-rate, low-temperature sputtering, two parallel targets were used and a magnetic field was applied perpendicular to them. The γ-electrons emitted by the targets contribute to formulation of a high-density plasma between the targets an
Publikováno v:
Electrical Engineering in Japan. 103:16-22
Publikováno v:
Journal of the Metal Finishing Society of Japan. 31:421-425
Publikováno v:
Electronics and Communications in Japan (Part I: Communications). 67:86-95
A target-facing type sputtering apparatus which can deposit three-layer films on a long film base continuously, is constructed. Using this apparatus, a Co-Cr perpendicular magnetic recording medium is formed continuously to obtain the following resul
Publikováno v:
Journal of Crystal Growth. 45:361-364
A new type of cathode sputtering apparatus with two facing targets was developed to prepare magnetic films at a high deposition rate without the extreme rise of the substrate temperature. When two disks of iron, nickel and ferrite were used as target
Publikováno v:
Electronics and Communications in Japan (Part I: Communications). 65:91-98
Permalloys are promising as candidates for a thin-film head and as a material for the soft substrate magnetic layer using normal magnetic memory media. Permalloy films prepared using facing-type targets and a high-rate and low-temperature sputtering
Publikováno v:
journal of the Japan Society for Testing Materials. 7:57-62
Usually thermal deterioration test of an electrical insulating material requires very long time. It is desirable to improve the method of testing for thermal deterioration so that we may get a final result in a short time near the operating temperatu
Publikováno v:
IEEE Transactions on Magnetics. 17:3062-3064
Magnetic and thermal properties of the amorphous films of (Fe,Co) 100-x (Ta,W) x , ( 4\leq\times\leq30 ) deposited by a rf diode sputtering have been investigated. The amorphous films were obtained for Ta or W content 'X' above 14 at.%. The dependenc
Publikováno v:
Journal of Applied Physics. 53:7807-7809
The influence of the addition of hydrogen H2 on the penpendicular magnetic anisotropy of the Gd–Co films deposited by ion beam sputtering has been investigated precisely. Specimen film about 5000 A thick were deposited on glass slide and rock salt
Publikováno v:
IEEE Transactions on Magnetics. 18:1433-1435
Permalloy films have been deposited on glass slide substrates by using a Two Facing'Targets type of sputtering method which can deposit magnetic films at a high rate (>1500 A/min) and low substrate temperature ( Hc\leq0.3 Oe). In bias sputtering, the