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pro vyhledávání: '"Shunbin Yang"'
Autor:
Weiguo Zuo, Shunbin Yang, Yajie Xing, Xiwen Xiao, Duona Fan, Hengyu Li, Guanqun Wang, Bin Qin, Song You, Xian Jia
Publikováno v:
Dalton transactions (Cambridge, England : 2003). 51(17)
Three mixed porphyrins, icpp (1–3), were synthesized via the reactions of 4-formylbenzoic acid and 4-imidazolecarboxaldehyde, and then five amorphous or crystalline Zr-MOFs—SPUZ (1–5) were obtained from icpp (1–3), timp and tcpp, respectively
Publikováno v:
ECS Transactions. 60:613-617
As the technology node is advanced to 28nm and below, several new materials are introduced such as ultra low-k dielectric and metal hard mask. This presents critical chalenges to Cu-CMP in terms of k-shift, poor within-die uniformity and deteriorated