Zobrazeno 1 - 10
of 12
pro vyhledávání: '"Shuji Azumo"'
Autor:
Takezo Mawaki, Akinobu Teramoto, Katsutoshi Ishii, Yoshinobu Shiba, Rihito Kuroda, Tomoyuki Suwa, Shuji Azumo, Akira Shimizu, Kota Umezawa, Yasuyuki Shirai, Shigetoshi Sugawa
Publikováno v:
Journal of Vacuum Science & Technology A. 40:053201
In this study, we investigated the adsorption and surface reaction of isopropyl alcohol (IPA) gas on silicon dioxide (SiO2) surfaces. The temperature dependence of the decomposition behavior of IPA and the effect on the SiO2 surface, such as reductio
Autor:
Shigetoshi Sugawa, Yoshinobu Shiba, Yasuyuki Shirai, Akira Shimizu, Akinobu Teramoto, Katsutoshi Ishii, Rihito Kuroda, Takezo Mawaki, Shuji Azumo, Tomoyuki Suwa, Kota Umezawa
Publikováno v:
Journal of Vacuum Science & Technology A. 39:013403
The reduction of copper oxide by isopropyl alcohol (IPA) gas and its mechanism were investigated toward the selective process of copper (Cu) wiring. Also, the decomposition behavior of IPA gas and surface modification during the IPA treatment on Cu a
Autor:
Hirokazu Asahara, Takayoshi Shimura, Shuji Azumo, Takuji Hosoi, Tsunenobu Kimoto, Kenji Yamamoto, Takashi Nakamura, Heiji Watanabe, Shigetoshi Hosaka, Masatoshi Aketa, Yusaku Kashiwagi
Publikováno v:
Japanese Journal of Applied Physics. 59:021001
Aluminum-based high-permittivity (high-k) gate dielectrics and suitable metal electrodes were systematically designed for advanced SiC power metal-oxide-semiconductor field-effect transistors (MOSFETs). Although electron injection into alumina (Al2O3
Autor:
Kenji Yamamoto, Tsunenobu Kimoto, Yusaku Kashiwagi, Shigetoshi Hosaka, Takayoshi Shimura, Takuji Hosoi, Masatoshi Aketa, Hirokazu Asahara, Shuji Azumo, Takashi Nakamura, Heiji Watanabe
Publikováno v:
2017 29th International Symposium on Power Semiconductor Devices and IC's (ISPSD).
Advanced metal/high-k gate stack technology for SiC-based power MOSFET was demonstrated. We found that the Hf incorporation into aluminum oxynitride (HfAlON gate insulator) combined with TIN electrode effectively improves the stability of threshold v
Publikováno v:
MATERIALS TRANSACTIONS. 49:1415-1418
The magnetic properties and amorphous formation ability of Pr-based alloys have been reported and discussed. In this paper, Pr90Fe10 alloys were studied to reveal the solidification behavior associated with undercooling, magnetic properties of the me
Publikováno v:
Journal of the Japan Institute of Metals. 72:80-84
In the last decades, Nd-Fe amorphous alloys have been studied by many methods because of high coercivity at room temperature and relation to Nd-Fe-B permanent magnets. In this study, we examined the effect of the containerless process for high underc
Publikováno v:
MATERIALS TRANSACTIONS. 47:1568-1571
The amorphous formation ability and the magnetic properties of Nd 60 Fe 30-x Co x Al 10 (x = 10, 15, 20 or 30) alloys in the containerless process were studied by the new gas jet flow type levitating process. The gas jet flow type levitating process
Autor:
Shuji Azumo, Katsuhisa Nagayama
Publikováno v:
MATERIALS TRANSACTIONS. 47:2842-2845
It is reported that Nd-Fe-Co-Al amorphous alloys have high bulk amorphous formation ability and high coercivity by rapid solidification method. We have examined the undercooling solidification, bulk amorphous formation and high coercivity appearance
Publikováno v:
Journal of the Japan Institute of Metals. 70:138-141
For Rare Earth-Transition Metal-Al with high undercooled liquid formability and glass-forming ability, bulk alloys have been produced with gas jet flow type electromagnetic levitation process, which is a new containerless process. A series of alloys
Autor:
Katsuhisa Nagayama, Shuji Azumo
Publikováno v:
Journal of the Japan Institute of Metals. 69:399-401
It is reported that La-Al-Transition Metal alloys have high undercooled melt formation and high bulk amorphous formation ability by using rapid solidification process. We have examined the undercooling solidification and remarkable nucleation control