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pro vyhledávání: '"Shuichi Nishide"'
Autor:
Kangsa Pak, Yukichi Takamatsu, Takashi Yoshimura, Naoki Ohshima, Atsushi Ichige, Hiroo Yonezu, Shuichi Nishide
Publikováno v:
Journal of Crystal Growth. :325-329
Tertiarybutylhydrazine (TBHy) is one of the alternative nitrogen sources to ammonia. We investigated pyrolysis of TBHy using quadrupole mass spectrometer and grew GaN films on (0 0 0 1) sapphire substrates by low-pressure metal-organic vapor-phase ep