Zobrazeno 1 - 5
of 5
pro vyhledávání: '"Shreeram V. Deshpande"'
Autor:
Shreeram V. Deshpande
Publikováno v:
Injury. 36:1067-1074
Casting materials are commonly used in a trauma and post-operative setting in orthopaedic practice. Swelling after trauma or surgery is universal, hence, the importance of understanding the pressure-volume dynamics of various materials commonly used
Publikováno v:
SPIE Proceedings.
Flash memory chips are playing a critical role in semiconductor devices due to increased popularity of hand held electronic communication devices such as cell phones and PDAs (personal Digital Assistants). Flash memory offers two primary advantages i
Publikováno v:
SPIE Proceedings.
Plasma (dry) etching is a key step in semiconductor device manufacturing processes whereby the resist pattern is transferred to a substrate. As the resist thickness is reduced to meet stringent transparency requirements in photolithography, the usage
Publikováno v:
SPIE Proceedings.
This paper describes the development of a new conformal i- line BARC. With the advent of flash memory deices the topography can be greater than 0.5 micrometers . Maintaining CD control through the BARC etch step over such a high topography can be a c
Autor:
Shreeram V. Deshpande, William J. Simmons, Joe Johnson, James E. Lamb, Nickolas L. Brakensiek, Xiaoming Wu, Xie Shao, Gu Xu
Publikováno v:
SPIE Proceedings.
Dual Damascene (DD) process has been implemented in manufacturing semiconductor devices with smaller feature sizes (