Zobrazeno 1 - 3
of 3
pro vyhledávání: '"Shota Torikawa"'
Publikováno v:
SPIE Proceedings.
For yield improvement of 3D-device manufacturing, metrology for the variability of individual device-features is on hot issue. Transmission Electron Microscope (TEM) can be used for monitoring the individual cross-section. However, efficiency of proc
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::dd45b9d11982bd7d4f0bf5f9f1b12335
https://doi.org/10.1117/12.2218997
https://doi.org/10.1117/12.2218997
Autor:
Ikuko Nakatani, Toshihide Agemura, Hiroaki Matsumoto, Shota Torikawa, Takahiro Sato, Masahiro Kiyohara, Yuka Aizawa, Takeshi Sunaoshi
Publikováno v:
Microscopy and Microanalysis. 23:1508-1509
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::5f0d522c13f6e8bd785f44f2fdd1536e
https://doi.org/10.1017/s1431927617008200
https://doi.org/10.1017/s1431927617008200
Autor:
Yuka Aizawa, Takahiro Sato, Takeshi Sunaoshi, Hiroaki Matsumoto, Toshihide Agemura, Shota Torikawa, Ikuko Nakatani, Masahiro Kiyohara
Publikováno v:
Microscopy & Microanalysis; 2017 Special issue, Vol. 23, p1508-1509, 2p, 1 Color Photograph, 2 Black and White Photographs