Zobrazeno 1 - 4
of 4
pro vyhledávání: '"Shoji Miyake, Shoji Miyake"'
Characteristics of an ECR Plasma Sputtering Source at Low Ar/N2Gas Pressures for Thin Film Synthesis
Publikováno v:
Japanese Journal of Applied Physics; July 1997, Vol. 36 Issue: 7 p4583-4583, 1p
Autor:
Yasunori Ohtsu, Yasunori Ohtsu, Gen Tochitani, Gen Tochitani, Hiroharu Fujita, Hiroharu Fujita, Jinqiu Zhang, Jinqiu Zhang, Yuichi Setsuhara, Yuichi Setsuhara, Shoji Miyake, Shoji Miyake
Publikováno v:
Japanese Journal of Applied Physics; July 1997, Vol. 36 Issue: 7 p4620-4620, 1p
Publikováno v:
Japanese Journal of Applied Physics; June 1997, Vol. 36 Issue: 6 p3629-3629, 1p
Autor:
Okuno, Yoshihiro, Ohtsu, Yasunori, Fujita, Hiroharu, Wei Chen, Wei Chen, Shoji Miyake, Shoji Miyake
Publikováno v:
Japanese Journal of Applied Physics; November 1993, Vol. 32 Issue: 11 pL1698-L1698, 1p