Zobrazeno 1 - 2
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pro vyhledávání: '"Shogo Awata"'
Publikováno v:
Journal of Electron Microscopy. 48:569-573
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::7053a8b9481bdad17005d939ab7a1a95
https://doi.org/10.1093/oxfordjournals.jmicro.a023717
https://doi.org/10.1093/oxfordjournals.jmicro.a023717
Autor:
Tomohiko Iijima, Shinichi Ogawa, Toshihiko Kanayama, Shogo Awata, Shintaro Komatani, Shigeru Kakinuma
Publikováno v:
2011 IEEE International Interconnect Technology Conference.
Several novel imaging modes of the recently developed helium ion microscope (HIM) 1) were explored that may make the HIM a tool of particular value to Cu / low-k (dielectric constant) interconnect structures. Mechanism of the “through dielectric”
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::d9dd8c26cbff9fe632c1accf9fd60aff
https://doi.org/10.1109/iitc.2011.5940328
https://doi.org/10.1109/iitc.2011.5940328