Effect of Background Pressure on Deposition Rate and Crystallinity of Deposited Silicon in Non-Equilibrium Plasma Jet CVD

Autor: Satoshi Nishida, Ryo Nodo, Hiroshi Muta, Shizuma Kuribayashi

Publikováno v: KAGAKU KOGAKU RONBUNSHU. 41:148-152

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_________::6ed88ddb89493e95a5c5d0972b2a0e3d
https://doi.org/10.1252/kakoronbunshu.41.148

Effect of VHF excitation frequency on localized deposition of silicon in non-equilibrium-plasma-enhanced CVD by an under-expanded supersonic jet

Autor: Shizuma Kuribayashi, Hiromu Takatsuka, Shoji Akahori, Yoshiaki Takeuchi, Yasuhiro Yamauchi, Jiro Nakamura, Daisuke Ando, Satoshi Nishida, Yoshihiro Tsunekawa, Hiroshi Muta

Publikováno v: Surface and Coatings Technology. 225:75-78

High rates of localized silicon deposition on a low temperature (473 K) substrate impinged by an under-expanded supersonic jet in a conventional non-equilibrium-plasma chemical vapor deposition process at different excitation frequencies were observe

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_________::9d31dc915b1024d02cb41dea92717bd3
https://doi.org/10.1016/j.surfcoat.2013.03.018

Development and Application of Micro-beam Nuclear Reaction Analysis for Observation of Hydrogen Distribution

Autor: Masuaki Matsumoto, Markus Wilde, Tadashi Narusawa, Shizuma Kuribayashi, Takuya Nebiki, Ito Takehiko, Iwamura Yasuhiro, Katsuyuki Fukutani, Hiroyuki Matsuzaki, Daiichiro Sekiba, Hiroki Yonemura, Jirouta Kasagi, Tatsuo Okano, S. Ogura

Publikováno v: Shinku. 50:574-578

A microscope for hydrogen has been developed by means of micro-beam nuclear reaction analysis. The resonance nuclear reaction between proton and 15N accelerated up to ~6 MeV is used. The micro-beam of 15N ion was made by a glass capillary, which has

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_________::0a8d02f0aa28f6deb3e1eda1166f4652
https://doi.org/10.3131/jvsj.50.574

[Untitled]

Autor: Masahito TAGAWA, Hitoshi AKIMICHI, Chiharu MAEDA, Masahiro HIRATA, Shin-ichi NISHIZAWA, Seiji HIROKI, Sadamitsu TANZAWA, Takashi ARAI, Tetsuya ABE, Katsusuke SHIMIZU, Jyun-nosuke NAKATANI, Shizuma KURIBAYASHI, Megumi NAKAMURA, Toru SASAKI, Yoshiro SHIOKAWA, Nozomu HATTORI, Takafumi MORII, Masaaki HIRAI, Masahiko KUSAKA, Motohiro IWAMI, Zhao-Xiong XIE, Kayo IWASE, Ken-ichi TANAKA, Toshimi SUTOU, Tomohiro UMEZAWA, Daisuke ESASHIKA, Shigeru SAITO, Tetsuo SOUMURA, Shuji ISONO, Hideki YAMASAKI, Hakuto MURAKAMI, Masahiko YAMAMOTO, Takuji OYAMA, Takashi IKUNO, Jeong-Tak Ryu, Shigeharu OHKURA, Yang-Gyu Baek, Shin-ichi HONDA, Mitsuhiro KATAYAMA, Masahiko KITAGAWA, Kenjiro OURA, Keiichi FUJIMOTO, Kuei-Yi LEE, Nobuhiko OTA, Shinji SHINABE, Yuto FUKUMA, Yusuke SUETSUGU, Yao-Jane HSU, Yasunori TANIMOTO, Youichirou HORI, Ken-ichi KANAZAWA, Masanori KOBAYASHI, Masahide GOTOH, Koichi SUDOH, Hiroshi IWASAKI, Keisuke KAMETANI, Touichi HATANO, Masato KIUCHI, Katsutoshi TANAKA, Seiji TAKECHI, Satoshi SUGIMOTO, Seiichi GOTO, Tsukasa KOBAYASHI, Ryoki TOBE, Teruo YANAGIHASHI, Tetsuro OBAYASHI, Shigemi SUGINUMA, Tetsuo OGAWA, Kiyohide KOKUBUN, Takashi SEKIDO, Ichiro TAKANO, Yoshio SAWADA, Yoshiaki SAKURAI, Akio OKAMOTO, Toshikazu NOSAKA, Hiroya NAKAJIMA, Hiroshi KODA, Masaaki YOSHITAKE, Toyohito UCHIZONO, Toshiaki YASUI, Hirokazu TAHARA, Takao YOSHIKAWA, Akio SUZUKI, Jun SAKAMOTO, Takeshi MITSUHASHI, Akihito MORI, Takanori AOKI, Tatsuhiko MATSUSHITA, Masahiro OKUDA, Hiroyuki NAKANO, Hideo FURUHASHI, Toshio YOSHIKAWA, Akinori MAEDA, Yoshiyuki UCHIDA, Kenzo KOJIMA, Asao OHASHI, Shizuyasu OCHIAI, Teruyoshi MIZUTANI, Yasuharu YAMASHITA, Shu KUROKAWA, Akira SAKAI, Tomohide SASAKI, Tetsuro SHIRAO, Nobuhiro KANEKO, Keniche SHUDO, Masatoshi TANAKA, Kaoru OJIMA, Masamichi YOSHIMURA, Kazuyuki UEDA, Joselito LABIS, Akihiko OHI, Toshinori FUJIKI, Tadao TODA, Hiroshi HARIMA, Nobumasa KIWA, Yasuhito GOTOH, Hiroshi TSUJI, Junzo ISHIKAWA, Yoichiro YGI, Kiminori KAKITANI, Hiroko KAJI, Akio YOSHIMORI, Kazuhiko HASEGAWA, Wilson A. Dino, Hideaki KASAI, Ayao OKIJI, Katsuhisa CHIDA, Tetsumi TANABE, Yoshitsugu ARAKAKI, Morio YOSHIZAWA, Kouji NODA, Katsuhiro NAKAMURA, Yasushi YAMANO, Shinichi KOBAYASHI, Yoshio SAITO, Yoshihiro SATOH, Tomio KUBO, Hideharu MATSUSHIMA, Ken KASUGA, Hiroki ASARI, Norihiko IMAIZUMI, Kentarou SEKIKAWA, Masahiro SHIBUSAWA, Keisuke TAJIRI, Zenzaburo KABEYA, Yoshikazu NAKAYAMA, Shin AKIDUKI, Kazuhiro HASHIMOTO, Masamitu TAKAHASI, Jun'ichiro MIZUKI, Kazuhisa TAMURA, Toshihiro KONDO, Kohei UOSAKI, Shigeharu TAMURA, Masato YASUMOTO, Nagao KAMIJO, Yoshio SUZUKI, Mitsuhiro AWAJI, Akihisa TAKEUCHI, Hidekazu TAKANO, Hiroshi ITOH, Hidehiko NONAKA, Shingo ICHIMURA, Masahiro TOSA, Kazutaka MITSUISHI, Masaki TAKEGUCHI, Yoshio FUKUDA, Masahiro GOTO, Akira KASAHARA, Kazuo FURUYA, Kazuhiro YOSHIHARA, Kazuhiko MIMOTO, Takashi MATSUMOTO, Kunio OKIMURA, Kimiko SATO, Tsutomu TAKAHASHI, Tadashi NAKAMURA, Naohiro HORII, Akihiro INOUE, Nobuharu OHSAKO, Takeshi MIYASHITA, Kengo HIDAKA, Atsushi TANAKA, Hisahiro TANGE, Yuji TANAKA, Katsumi NISHIMURA, Takashi KOJIMA, Nozomu TAKAGI, Tatsuo WAKAIDA, Takeo HOSAKA, Akira SAKAZAKI, Takahiro OKADA, Akihiro TANAKA, Yasunori Yamamura, Yoshiyuki MIZUNO, Teiichi HOMMA, Sin'ichi INOUE, Yuhjin YAMAZAKI, Toshiaki FUJINO, Tomohisa OKUNO, Ken-ichi OHTOMI, Ken'ichi MIURA, Itsuo ISHIGAMI, Hideaki HOSHINO, Tomoyuki MIZUKOSHI, Fumihiro URATANI, Hiroshi NAKANISHI, Won-chul Moon, Tatsuo YOSHINOBU, Osamu SUEKANE, Masakazu TANAKA, Toshiko OKUI, Katsuhito ARAKAWA, Shigehiko HASEGAWA, Hisao NAKASHIMA, Miwako KUBO, Hiroshi MORIKAWA, Shizuo FUJITA, Shigeo FUJITA, Toshinari YAMAZAKI, Toshio YOSHIZAWA, Toshio KIKUTA, Shigeki HIROBAYASHI, Noriyuki NAKATANI, Tatsuo YAMABUCHI, Masatomo NISHIURA, Toru KANAJI, Makoto TANAKA, Z. An

Publikováno v: SHINKU. 44:326-400

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_________::61a7d37ab4bac01e00e5c363e6c14596
https://doi.org/10.3131/jvsj.44.326

13C-Selective Infrared Multiple Photon Decomposition of β-Propiolactone, β-Butyrolactone, and Diketene with a CO2 TEA Laser

Autor: Shunzo Yamamoto, Kyoko Sugita, Shigeyoshi Arai, Tetsuro Majima, Shizuma Kuribayashi, Yoshiki Miyamoto

Publikováno v: The Journal of Physical Chemistry A. 104:2587-2590

13C-Selective infrared multiple photon decomposition of lactone compounds has been studied using a CO2 TEA (transversely excited atmospheric) laser. The main decomposition products were ethylene and CO2 in β-propiolactone. We obtained CO2 with a 13C

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_________::36751bc1036404b20c7e4b50bff31359
https://doi.org/10.1021/jp9936547