Zobrazeno 1 - 10
of 46
pro vyhledávání: '"Shinji Yamakawa"'
Publikováno v:
Journal of Photopolymer Science and Technology. 35:61-65
Publikováno v:
Journal of Photopolymer Science and Technology. 35:55-59
Autor:
Yosuke Ohta, Atsushi Sekiguchi, Shinji Yamakawa, Tetsuo Harada, Takeo Watanabe, Hiroki Yamamoto
Publikováno v:
Journal of Photopolymer Science and Technology. 35:49-54
Publikováno v:
Journal of Photopolymer Science and Technology. 34:111-115
Publikováno v:
Journal of Photopolymer Science and Technology. 34:49-53
Autor:
Takahiro Kozawa, Shinji Yamakawa, Mari Fukunaga, Hiroki Yamamoto, Teppei Yamada, Kazumasa Okamoto, Takeo Watanabe, Hiroto Kudo
Publikováno v:
Journal of Photopolymer Science and Technology. 32:805-810
We examined the synthesis and resist properties of tellurium-containing molecular resist materials. By the condensation reaction of anisol, phenol, and 2-phenylphenol with tellurium tetrachloride (TeCl4), dichloro di(4-hydroxyphenyl) telluride (CHPT)
Publikováno v:
Photomask Japan 2021: XXVII Symposium on Photomask and Next-Generation Lithography Mask Technology.
Publikováno v:
Photomask Japan 2021: XXVII Symposium on Photomask and Next-Generation Lithography Mask Technology.
Publikováno v:
Reactive and Functional Polymers. 136:19-24
(bpy)NiBr2 catalyzes the copolymerization of butadiene and norbornene (56:44) in the presence of methylaluminoxane at 30 °C. 1H NMR spectrum of the copolymer contains signals of norbornene units and 1,4-butadiene units and shows the molar ratio of t
Publikováno v:
Japanese Journal of Applied Physics. 60:087005
Extreme ultraviolet (EUV) lithography has recently been utilized as a high-volume manufacturing technology for advanced semiconductors. An EUV mirror can be easily contaminated in the existence of a residual hydrocarbon vapor gas inside an exposure c