Zobrazeno 1 - 6
of 6
pro vyhledávání: '"Shinji Ueyama"'
Autor:
Jaehwang Jung, Wookrae Kim, Jinseob Kim, Seungwoo Lee, Inho Shin, Changhyeong Yoon, Seoyeon Jeong, Yasuhiro Hidaka, Mitsunori Numata, Shinji Ueyama, Changhoon Choi, Myungjun Lee
Publikováno v:
Optics express. 30(26)
We present an innovative ellipsometry technique called self-interferometric pupil ellipsometry (SIPE), which integrates self-interference and pupil microscopy techniques to provide the high metrology sensitivity required for metrology applications of
Publikováno v:
The Journal of Chemical Thermodynamics. 180:107021
Publikováno v:
Metrology, Inspection, and Process Control XXXVI.
Autor:
Yasuhiro Hidaka, Jinyong Kim, Jaehwang Jung, Mitsunori Numata, Wookrae Kim, Shinji Ueyama, Myungjun Lee
Publikováno v:
Metrology, Inspection, and Process Control XXXVI.
Autor:
Myungjun Lee, Shinji Ueyama, Yasuhiro Hidaka, Mitsunori Numata, JaeHwang Jung, Jinseob Kim, Wook-Rae Kim
Publikováno v:
Metrology, Inspection, and Process Control for Semiconductor Manufacturing XXXV.
An innovative self-interferometric pupil ellipsometry (SIPE) technique has been demonstrated to overcome the accuracy and throughput limitations raised from the conventional spectroscopic ellipsometry (SE) tools to precisely measure the optical criti
Publikováno v:
Novel Research in Sciences. 1