Výsledky vyhledávání - "Shinichiro Saisho"

Development of digitally processed DC reactive sputtering and its application to the synthesis of (Er0.1Y0.9)2SiO5 layered crystalline thin film

Autor: Tomoki Kasumi, Shinichiro Saisho, Hideo Isshiki, Ghent Nakamura, Yasuhito Tanaka

Publikováno v: Journal of Applied Physics. 130:185301

We have developed a digitally processed DC reactive sputtering (DPDRS) system that enables synthesis of arbitrarily designed atomically precise deposition of metal oxide compounds. Pulsed-DC sputtering employing a digital pulse pattern generator can

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_________::fac6d3bc7318e9d3a5b82b0614e715b3
https://doi.org/10.1063/5.0065975

Zobrazit plný text záznamu

Optical and structural properties of dense SiO2, Ta2O5 and Nb2O5 thin-films deposited by indirectly reactive sputtering technique

Autor: Akinori Matusita, Yizhou Song, Kazuo Kikuchi, Shigeharu Matsumoto, Kazuhiko Maruta, Takeshi Sakurai, Shinichiro Saisho

Publikováno v: Vacuum. 59:755-763

The indirectly reactive sputtering via radical source (ISR) system, which is a method to make an oxide film by repeating the separated deposition and oxidation using a d.c. pulse sputtering and an oxygen radical-rich source, was developed to deposit

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_________::7182bf2b5110ff428921a4ac72fe3cc9
https://doi.org/10.1016/s0042-207x(00)00344-4

Zobrazit plný text záznamu

Vyhledávací nástroje:

Upřesnit hledání