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pro vyhledávání: '"Shingo Nariai"'
Autor:
Junichi Kodama, Masamoto Arakawa, Takahiro Takahashi, Taeka Inagaki, Yoshinori Ema, Shingo Nariai
Publikováno v:
physica status solidi c. 12:908-911
Estimating the predicted results of experimental data by a simulator is one of the most important processes in deciding the performance of the automatic modeling system of reaction mechanisms in chemical vapor deposition (CVD). Therefore, we develope