Zobrazeno 1 - 3
of 3
pro vyhledávání: '"Shin-ichi Fukaya"'
Publikováno v:
Species Diversity. 25:89-102
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::c65dae5ab5e92eee9a0e5fb335347ba4
https://doi.org/10.12782/specdiv.25.89
https://doi.org/10.12782/specdiv.25.89
Publikováno v:
Species Diversity; 2020, Vol. 25 Issue 1, p89-102, 14p
Publikováno v:
Journal of Crystal Growth. 266:327-332
From the viewpoint to obtain a very flat semiconductor silicon epitaxial film, the influence of an epitaxial reactor design on a local thickness profile of a silicon epitaxial film is studied. The characteristic thickness valleys formed in a trichlor
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::baa126e784781dab71b97602adbbfdaa
https://doi.org/10.1016/j.jcrysgro.2004.02.062
https://doi.org/10.1016/j.jcrysgro.2004.02.062