Zobrazeno 1 - 10
of 15
pro vyhledávání: '"Shin Rung Peng"'
Cross-platform (NXE-NXT) machine-to-machine overlay matching supporting next node chip manufacturing
Autor:
Marcel Beckers, Niels Lammers, Marcel Mastenbroek, Jean Phillippe van Damme, Laurens van Bokhoven, Cathy Wang, Shin-Rung Peng, Wilson Tzeng, Li-Jui Chen, Chun-Kuang Chen, Albert Mollema, Harald Petrus Cornelis Vos, Floris Teeuwisse, Ting-Ju Yueh, Hsueh-Hung Wu, Theo Thijssen, Alexander Padi, Hsiao-Lan Chen, Chia-Wei Hung, Miao-Chi Chen, Leon Martin Levasier, John Lin, Robin Tijssen, Kevin Cheng
Publikováno v:
Optical Microlithography XXXI
EUV lithography enables the transition from multiple patterning in DUV back to single patterning in EUV, with the associated cost benefit. While imaging and patterning becomes easier with EUV, cross-platform overlay performance needs to be taken into
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::e03f955c974980f6f1850dc5efe39104
https://doi.org/10.1117/12.2297387
https://doi.org/10.1117/12.2297387
Autor:
Yeau-Ren Jeng, Shin-Rung Peng
Publikováno v:
Wear. :70-74
Advances in nanotribology prompt the understanding of lateral junction growth at the nanoscale an emerging issue. Our previous atomistic simulations have presented the atomic origins of the lateral junction growth mechanism at the nanoscale, which is
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::2220bd6c2f4e39c3145ccf0f5e13d226
https://doi.org/10.1016/j.wear.2011.12.002
https://doi.org/10.1016/j.wear.2011.12.002
Autor:
Yeau-Ren Jeng, Shin Rung Peng
Publikováno v:
Journal of Tribology. 129:743-753
This study investigates the effects of asperity interactions on the mean surface separation and real contact area of rough surfaces containing elliptical asperities with Gaussian and non-Gaussian height distributions. The elastic-plastic contact beha
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::9ef9cf9e28ca9357a38d7f4ddb64d9e1
https://doi.org/10.1115/1.2768073
https://doi.org/10.1115/1.2768073
Autor:
Shin Rung Peng, Ten-Chin Wen, Jun Yuan Jeng, Ching Ming Hsu, Peter Chen, Yi Fang Chiang, Yao Jane Hsu, Mu Huan Lee, Tzung-Fang Guo
Publikováno v:
Physical chemistry chemical physics : PCCP. 16(13)
A low temperature (
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::1dc3c9c857c641a44cc5e8cd6de97b28
https://pubmed.ncbi.nlm.nih.gov/24553998
https://pubmed.ncbi.nlm.nih.gov/24553998
Autor:
Thijssen, Theo, Beckers, Marcel, Mollema, Albert, Levasier, Leon, Padi, Alexander, Chia-Wei Hung, Hsiao-Lan Chen, van Bokhoven, Laurens, Lammers, Niels, van Damme, Jean Philippe, Teeuwisse, Floris, Tijssen, Robin, Tzeng, Wilson, Wang, Cathy, Mastenbroek, Marcel, Vos, Harald, Ting-Ju Yueh, Miao-Chi Chen, Hsueh-Hung Wu, Shin-Rung Peng
Publikováno v:
Proceedings of SPIE; 1/15/2018, Vol. 10587, p1-8, 8p
Autor:
Ten-Chin Wen, Jun-Yuan Jeng, Yi-Fang Chiang, Tzung-Fang Guo, Shin-Rung Peng, Mu-Huan Lee, Peter Chen
Publikováno v:
SPIE Newsroom.
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::a7b4216bb0246c04744a07a360fa3deb
https://doi.org/10.1117/2.1201307.005033
https://doi.org/10.1117/2.1201307.005033
Autor:
Jun Yuan Jeng, Tzung-Fang Guo, Peter Chen, Shin Rung Peng, Yi Fang Chiang, Ten-Chin Wen, Mu Huan Lee
Publikováno v:
Advanced materials (Deerfield Beach, Fla.). 25(27)
All-solid-state donor/acceptor planar-heterojunction (PHJ) hybrid solar cells are constructed and their excellent performance measured. The deposition of a thin C60 fullerene or fullerene-derivative (acceptor) layer in vacuum on a CH3 NH3 PbI3 perovs
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::07677f01d4168c7e188d8306fb48965e
https://pubmed.ncbi.nlm.nih.gov/23775589
https://pubmed.ncbi.nlm.nih.gov/23775589
Autor:
Shin-Rung Peng, Yeau-Ren Jeng
Publikováno v:
Journal of Tribology. 131
The friction coefficient (μ) of a contact surface with elliptical asperities is examined at various values of the plasticity index (ψ), the effective radius ratio (γ), the shear-strength-pressure proportionality constant (c), and the dimensionless
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::0ade87d38f129f7f9bfeb639f2206213
https://doi.org/10.1115/1.3075857
https://doi.org/10.1115/1.3075857
Autor:
Shin Rung Peng, Yeau-Ren Jeng
Publikováno v:
Part A: Tribomaterials; Lubricants and Additives; Elastohydrodynamic Lubrication; Hydrodynamic Lubrication and Fluid Film Bearings; Rolling Element Bearings; Engine Tribology; Machine Components Tribology; Contact Mechanics.
This study investigates the effects of asperity interactions on the mean surface separation and the real contact area for rough surfaces with non-Gaussian height distributions. The effects of the asperity interactions on the local deformation behavio
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::1e3882750c59edb3deba2c966cafc8fd
https://doi.org/10.1115/ijtc2006-12009
https://doi.org/10.1115/ijtc2006-12009
Autor:
Shin Rung Peng, Yeau-Ren Jeng
Publikováno v:
Applied Physics Letters. 94:163103
According to continuum mechanics theory, the metallic junctions formed between the contact asperities on two opposing surfaces increase in size until gross sliding occurs. Our atomistic simulations reveal that the onset of lateral junction growth is
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::a073df3cb74f70964cc43c5904899ee9
https://doi.org/10.1063/1.3122144
https://doi.org/10.1063/1.3122144