Zobrazeno 1 - 2
of 2
pro vyhledávání: '"Shin'ichi Kuwabara"'
Autor:
Shin'ichi Kuwabara, K. Kazama, Hiroki Shirai, M. Sakamoto, Yoshihiro Hayashi, T. Takahashi, Takashi Sakoh, Masami Hane, K. Takeda, Yoshiko Kasama, T. Ogura, Toshiji Taiji, N. Furutake, Jun Kawahara, Naoya Inoue, M. Watarai, Ippei Kume, Kenichiro Hijioka
Publikováno v:
Extended Abstracts of the 2011 International Conference on Solid State Devices and Materials.
Autor:
Yoshiko Kasama, Naoya Inoue, Naoya Furutake, Jun Kawahara, Masami Hane, Msasatoshi Watarai, Takafumi Takahashi, Kouichi Takeda, Ippei Kume, Hiroki Shirai, Takashi Sakoh, Misato Sakamoto, Toshiji Taiji, Kenichiro Hijioka, Yoshihiro Hayashi, Takashi Ogura, Kenya Kazama, Shin'ichi Kuwabara
Publikováno v:
Japanese Journal of Applied Physics. 51:02BB01
We have confirmed the basic performance of a new logic intellectual property (IP) compatible (LIC) embedded dynamic random access memory (eDRAM) with cylinder capacitors in the low-k/Cu back end on the line (BEOL) layers. The LIC-eDRAM reduces the co