Zobrazeno 1 - 3
of 3
pro vyhledávání: '"Shih-Jie Jhou"'
Publikováno v:
Atmosphere, Vol 8, Iss 1, p 23 (2017)
This study numerically investigates the effects of a moving crane and airflow on contaminant removal efficiency of various reticle box coverage sequences in a stocker. The analyzed characteristics of flow patterns are used to protect the reticles fro
Externí odkaz:
https://doaj.org/article/f57e04dcdcde45eaa47612552165aac1
Autor:
Shih-Jie Jhou, 周士傑
98
Photo-masks play the essential role of photographic negative film in the manufacturing of microelectronics components such as chips, wafers, MEMS or LCD panels. To meet the increasing demand of photo-masks, it is necessary to maintain high pr
Photo-masks play the essential role of photographic negative film in the manufacturing of microelectronics components such as chips, wafers, MEMS or LCD panels. To meet the increasing demand of photo-masks, it is necessary to maintain high pr
Externí odkaz:
http://ndltd.ncl.edu.tw/handle/48vzvj
Publikováno v:
Atmosphere, Vol 8, Iss 1, p 23 (2017)
Atmosphere; Volume 8; Issue 1; Pages: 23
Atmosphere; Volume 8; Issue 1; Pages: 23
This study numerically investigates the effects of a moving crane and airflow on contaminant removal efficiency of various reticle box coverage sequences in a stocker. The analyzed characteristics of flow patterns are used to protect the reticles fro
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::d54ff603bbfd100ddf234502c0779e18
http://www.mdpi.com/2073-4433/8/1/23
http://www.mdpi.com/2073-4433/8/1/23