Zobrazeno 1 - 10
of 73
pro vyhledávání: '"Shigeru BABA"'
Publikováno v:
Journal of the Vacuum Society of Japan. 58:261-264
Publikováno v:
Journal of the Vacuum Society of Japan. 57:16-22
Publikováno v:
Vacuum. 87:109-113
In this study, we investigated the effect of the target bias voltage during the pulse-off period in the pulsed magnetron sputtering (PMS) of repetition frequency 200 Hz and duty ratio 5–20%. Copper films were deposited by the PMS for Ar gas pressur
Publikováno v:
Journal of the Vacuum Society of Japan. 57:152-154
Publikováno v:
Vacuum. 84:1368-1371
With a high-power impulse magnetron sputtering (HiPIMS) apparatus, it has been studied how the target bias voltage during the off-pulse period affects the stability of the generated plasma. We have prepared an electrical pulse power source which can
Publikováno v:
Journal of Adhesion Science and Technology. 23:1973-1991
An FFT-based signal processing method for the micro-scratch test, proposed by Baba was compared with a conventional micro-scratching method to quantitatively evaluate the suitability of the technique. Original scratch signals from a micro-scratch sys
Autor:
Shigeru BABA
Publikováno v:
Journal of The Surface Finishing Society of Japan. 58:275-279
Publikováno v:
Vacuum. 74:595-599
Magnesium oxide (MgO) films were prepared by RF sputter deposition technique, and their secondary electron emission (SEE) coefficient was examined in relation to film thickness and surface morphology. The optical constant and film thickness were eval
Publikováno v:
Vacuum. 74:387-390
Optical emission from axisymmetric copper-sputter deposition plasma has been measured in a spatially resolved way, and the radial distribution profiles are obtained using a computed tomography technique. Among the emission spectrum two strong copper
Publikováno v:
Vacuum. 74:591-594
The structural changes of sequentially evaporated thin Cu–In films on molybdenum substrate were studied by the depth profiling technique in an XPS apparatus. Pure metal materials were deposited by vacuum evaporation at room temperature. A specimen