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pro vyhledávání: '"Shigeo Mizoroke"'
Publikováno v:
2015 26th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC).
Reducing time to market and cost-of-ownership is essential to MEMS makers. Therefore, lithography tools that continue to provide new, flexible, and versatile substrate alignment solutions, including backside alignment capabilities, are crucial factor
Autor:
Jumpei Fukui, Volker Berghof, Shigeo Mizoroke, Tetsuji Onuki, Hamid R. Khorram, Makoto Osanai, Susumu Hagiwara
Publikováno v:
2012 SEMI Advanced Semiconductor Manufacturing Conference.
Similar to IC manufacturing, Cost of Ownership (CoO) and enhanced productivity are key focus areas for Microelectromechanical Systems (MEMS), Light Emitting Diodes (LED) and Air Bearing Surface (ABS) manufacturers. Here also, cost reduction can be ac