Zobrazeno 1 - 4
of 4
pro vyhledávání: '"Shibalov, Maxim"'
Autor:
Bondareva, Julia, Timofeeva, Ekaterina, Anikanov, Alexandr, Krasilnikov, Maxim, Shibalov, Maxim, Sen, Vasily, Mumlyakov, Alexander, Evlashin, Stanislav, Tarkhov, Mikhail
Nowadays, microelectronics and nanoelectronics require the search for new materials, including masks for creating structures. Today, the intermediate hard mask strategy is one of the key issues in achieving a good balance between lithography and etch
Externí odkaz:
http://arxiv.org/abs/2110.13639
Autor:
Gubanova, Oksana, Poletaev, Andrey, Komarova, Natalia, Grudtsov, Vitaliy, Ryazantsev, Dmitriy, Shustinskiy, Mark, Shibalov, Maxim, Kuznetsov, Alexander
Publikováno v:
In Materials Science in Semiconductor Processing July 2024 177
Autor:
Asharchuk, Ilya, Vovk, Nikolay, Filippov, Ivan, Shibalov, Maxim, Mumlyakov, Alexander, Diudbin, George, Anufriev, Yuriy, Tarkhov, Michael
Publikováno v:
In Optical Materials April 2024 150
Autor:
Bondareva, Julia, Timofeeva, Ekaterina, Anikanov, Alexandr, Krasilnikov, Maxim, Shibalov, Maxim, Sen, Vasily, Mumlyakov, Alexander, Evlashin, Stanislav, Tarkhov, Mikhail
Publikováno v:
In Thin Solid Films 30 November 2022 762