Zobrazeno 1 - 3
of 3
pro vyhledávání: '"Sheng-Chi Chin"'
Publikováno v:
Enzyme and Microbial Technology. 23:311-320
Acclimated sludge was immobilized by a previously developed phosphorylated polyvinyl alcohol (PVA) gel. The immobilized-cell reactor system was established in a 12-l continuous aeration vessel with a synthetic municipal wastewater as the feed substra
Publikováno v:
SPIE Newsroom.
Autor:
Kuei-Shun Chen, Wen-Chuan Wang, Sheng-Chi Chin, Hsin-Chang Lee, Chi-Lun Lu, Yao Ching Ku, Ru-Gun Liu, Chih-Cheng C. Chin, Ren-Guey Hsieh, Hung-Chang Hsieh, John Lin, Shih-Ming Chang, Cherng-Shyan Tsay, Yung-Sung Yen
Publikováno v:
SPIE Proceedings.
The control of global critical dimension uniformity (GCDU) across the entire mask becomes an important factor for the high-end masks quality. Three major proceses induce GCDU error before after-developing inspection (ADI) including the E-Beam writing