Zobrazeno 1 - 1
of 1
pro vyhledávání: '"Shen-Suo Yan"'
Autor:
Yuhang Zhao, Xin-Ping Qu, Haoyu Xu, Shen-Suo Yan, Ming Li, Mikhail R. Baklanov, Zheng-Jun Hu, Jing Zhang, Shoumian Chen, Hao Wan
Publikováno v:
Applied Surface Science. 498:143887
Molecular and atomic permeability, thermal stability and interfacial reactions of ultrathin Ta, TaN and Ta/TaN stack as barrier to Cu/low - k interconnects have been studied. It is shown the barrier layers containing TaN and Ta/TaN have good thermal
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::7680af836e9786333273e80d0faa903f
https://doi.org/10.1016/j.apsusc.2019.143887
https://doi.org/10.1016/j.apsusc.2019.143887
