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pro vyhledávání: '"She Na Jia"'
Autor:
Bruce W. Lee, Fang Li, Sally Ann Henry, She Na Jia, Fu Ping Chen, Tao Zhang, Hong Li, Chung Wei Wang, David H. Wang, Yi Yang, Wen Jun Wang, Jun Huang, Hai Bo Lei, Zhang Xiao-Yan, Jane Wang, Yunho Kim, Jason Lee, Zhang Yu Yu
Publikováno v:
Solid State Phenomena. 314:133-139
Batch SPM systems do not meet the current clean specification/requirements below 28nm. Single wafer SPM systems use a high volume of chemistry which runs to drain, while meeting the cleaning specifications below 28nm. The work in this paper describe
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::6ddbb000eca39ee7e343a8254bdb4aee
https://doi.org/10.4028/www.scientific.net/ssp.314.133
https://doi.org/10.4028/www.scientific.net/ssp.314.133
