Zobrazeno 1 - 5
of 5
pro vyhledávání: '"Shayaan Saghir"'
Autor:
Shayaan Saghir, Muhammad Mubasher Saleem, Amir Hamza, Kashif Riaz, Sohail Iqbal, Rana Iqtidar Shakoor
Publikováno v:
Sensors, Vol 21, Iss 21, p 7242 (2021)
This paper presents a systematic and efficient design approach for the two degree-of-freedom (2-DoF) capacitive microelectromechanical systems (MEMS) accelerometer by using combined design and analysis of computer experiments (DACE) and Gaussian proc
Externí odkaz:
https://doaj.org/article/fbddf3b1230e41ebbc9b2460ce959f04
Autor:
Muhammad Mubasher Saleem, Shayaan Saghir, Syed Ali Raza Bukhari, Amir Hamza, Rana Iqtidar Shakoor, Shafaat Ahmed Bazaz
Publikováno v:
Micromachines, Vol 12, Iss 3, p 310 (2021)
This paper presents a new design of microelectromechanical systems (MEMS) based low-g accelerometer utilizing mode-localization effect in the three degree-of-freedom (3-DoF) weakly coupled MEMS resonators. Two sets of the 3-DoF mechanically coupled r
Externí odkaz:
https://doaj.org/article/2dac4f41c6504c758a2f4687a5183c68
Autor:
Sohail Iqbal, Rana I. Shakoor, Shayaan Saghir, Amir Hamza, Kashif Riaz, Muhammad Mubasher Saleem
Publikováno v:
Sensors, Vol 21, Iss 7242, p 7242 (2021)
Sensors
Volume 21
Issue 21
Sensors (Basel, Switzerland)
Sensors
Volume 21
Issue 21
Sensors (Basel, Switzerland)
This paper presents a systematic and efficient design approach for the two degree-of-freedom (2-DoF) capacitive microelectromechanical systems (MEMS) accelerometer by using combined design and analysis of computer experiments (DACE) and Gaussian proc
Autor:
Syed Ali Raza Bukhari, Amir Hamza, Rana I. Shakoor, Shayaan Saghir, Shafaat A. Bazaz, Muhammad Mubasher Saleem
Publikováno v:
Micromachines, Vol 12, Iss 310, p 310 (2021)
Micromachines
Volume 12
Issue 3
Micromachines
Volume 12
Issue 3
This paper presents a new design of microelectromechanical systems (MEMS) based low-g accelerometer utilizing mode-localization effect in the three degree-of-freedom (3-DoF) weakly coupled MEMS resonators. Two sets of the 3-DoF mechanically coupled r
Publikováno v:
2020 IEEE 23rd International Multitopic Conference (INMIC).
This paper presents the design of a single DoF capacitive MEMS accelerometer considering the commercially available microfabrication process constraints. The microfabrication process considered for the design optimization is SOIMUMPs process with sil