Zobrazeno 1 - 10
of 26
pro vyhledávání: '"Sharma, Malavika"'
Autor:
Liang, Ted, Kim, Seong-Sue, Bork, Ingo, Sharma, Rachit, Sharma, Malavika, Rajagopalan, Archana, Durvasula, Bhardwaj, Mishra, Kushlendra, Zuo, Mary
Publikováno v:
Proceedings of SPIE; November 2023, Vol. 12751 Issue: 1 p127510Y-127510Y-8, 1147599p
Autor:
Bork, Ingo, Sharma, Rachit, Sharma, Malavika, Rajagopalan, Archana, Durvasula, Bhardwaj, Mishra, Kushlendra, Zuo, Mary
Publikováno v:
Proceedings of SPIE; 12/20/2023, Vol. 12751, p127510Y-127510Y-8, 1p
Using curvature-based pre-bias to reduce number of iterations in curvilinear mask process correction
Autor:
Renwick, Stephen P., Zuo, Zhiheng (Mary), Sharma, Malavika, Bork, Ingo, Durvasula, Bhardwaj, Buck, Peter
Publikováno v:
Proceedings of SPIE; October 2021, Vol. 11855 Issue: 1 p118550Q-118550Q-7, 1066958p
Autor:
Whiting, Charles, Bork, Ingo, Buck, Peter, Chia, Robin, Durvasula, Bharadwaj, Hill, Daniel M., Huda, Gazi, Jantzen, Ken, Leuthold, Matthew, Jianliang Li, Mellmann, Joerg, Mishra, Kushlendra, Rankin, Jed, Rao, Nageswara, Sharma, Malavika, Sharma, Rachit, Smith, Adam, Wentz, Michaela
Publikováno v:
Proceedings of SPIE; 7/30/2019, Vol. 11148, p1114805-1-1114805-12, 12p
Autor:
Sharma, Malavika, Durvasula, Bhardwaj, Rao, Nageswara, Bork, Ingo, Sharma, Rachit, Mishra, Kushlendra, Buck, Peter
Publikováno v:
Proceedings of SPIE; 7/30/2019, Vol. 11148, p111480Q-1-111480Q-7, 7p
Autor:
Sharma, Rachit, Bork, Ingo, Mishra, Kushlendra, ShiZhi Lyu, Linna Cong, Mingjing Tian, Sharma, Malavika, Durvasula, Bhardwaj, Rao, Nageswara, Buck, Peter
Publikováno v:
Proceedings of SPIE; 7/30/2019, Vol. 11148, p111480G-1-111480G-8, 8p
Autor:
Rankin, Jed H., Preil, Moshe E., Sharma, Malavika, Durvasula, Bhardwaj, Rao, Nageswara, Bork, Ingo, Sharma, Rachit, Mishra, Kushlendra, Buck, Peter
Publikováno v:
Proceedings of SPIE; September 2019, Vol. 11148 Issue: 1 p111480Q-111480Q-7, 1003328p
Autor:
Rankin, Jed H., Preil, Moshe E., Sharma, Rachit, Bork, Ingo, Mishra, Kushlendra, Lyu, ShiZhi, Cong, Linna, Tian, Mingjing, Sharma, Malavika, Durvasula, Bhardwaj, Rao, Nageswara, Buck, Peter
Publikováno v:
Proceedings of SPIE; September 2019, Vol. 11148 Issue: 1 p111480G-111480G-8, 1003329p
Autor:
Kasprowicz, Bryan S., Liang, Ted, Sharma, Rachit, Zuo, Mary, Bork, Ingo, Rajagopalan, Archana, Sharma, Malavika, Mishra, Kushlendra
Publikováno v:
Proceedings of SPIE; December 2022, Vol. 12293 Issue: 1 p1229309-1229309-10
Publikováno v:
Proceedings of SPIE; 7/6/2021, Vol. 11855, p118550Q-118550Q-7, 1p