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pro vyhledávání: '"Shannon Marie Crouch"'
Autor:
Jeremy A. Walraven, Ted B. Parson, Danelle M. Tanner, Roy H. Olsson, Shannon Marie Crouch, James Anthony Ohlhausen
Publikováno v:
SPIE Proceedings.
We report on long-term stability experiments on a novel MEMS radio frequency (RF) resonator fabricated in Aluminum Nitride technology. The AlN fabrication process allows for the realization of resonators, filters, and resonant sensors operating over
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::2ee66480e3e1877c02c25697c8a17b5d
https://doi.org/10.1117/12.846551
https://doi.org/10.1117/12.846551
