Zobrazeno 1 - 3
of 3
pro vyhledávání: '"Shang-Tsai Wu"'
Publikováno v:
International Symposium on Microelectronics. 2013:000389-000396
Thin-wafer handling is one of the key enabling technologies for 2.5D/3D IC integration. Usually, it temporary bonds the TSV (through-silicon via)/RDL (redistribution layer) wafer (e.g., passive and active interposers) to a supporting carrier wafer wi
Publikováno v:
2012 13th International Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems.
In this study, 3D IC integrations with a semi-embedded TSV interposer with stress relief gap under thermal operating and environmental conditions are investigated. Emphasis is placed on the determination of the TSV interposer warpage and the nonlinea
Publikováno v:
2012 13th International Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems.
In this study, 3D IC integrations with a TSV interposer supporting Moore's law chips on its top and bottom sides are investigated. Emphasis is placed on the determination of the TSV interposer warpage and the nonlinear stress and creep strain in the