Patterning hot spot verification using high speed e-beam metrospection with D2DB at foundry high volume manufacturing environment

Autor: Fang Wei, Chenming Zhang, Honglin Meng, Zhihao Chu, Chao Huang, Lin Wu, Han Chen, Daquan He, Lulu Chen, Donghan Jin, Elly Shi, Robbin Zhu, Shane Su, Pei Wang, Hong Wei Zhang, Kai Yuan Chi, Xuechen Zhu, Kolos Lin, Peja Lee, Selena Chen, Abdalmohsen Elmalk, Andy Zhang, Leon Liang

Publikováno v: 2021 International Workshop on Advanced Patterning Solutions (IWAPS).

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_________::0f4b96459e2a740a968a409a186b7216
https://doi.org/10.1109/iwaps54037.2021.9671249

Assessment of stochastic fail rate using E-beam massive metrology

Autor: Oliver D. Patterson, Camille Xu, Abdalmohsen Elmalk, Kuo-Feng Pao, Kunyuan Chen, Double Chung, Fuming Wang, Shane Su, Andy Lan, Sudharshanan Raghunathan, Marc Kea, Jason Liao, Daniels Bae, Aiqin Jiang, Richer Yang, Wallace He

Publikováno v: Metrology, Inspection, and Process Control for Semiconductor Manufacturing XXXV.

For advanced DRAM nodes, process window requirements have become extremely tight for Critical Dimension (CD) and Overlay. Determining process window based only on mean CD without quantifying defectivity on the wafer is no longer adequate. A superior

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_________::5cf1acfb031bdad674451759acb8160e
https://doi.org/10.1117/12.2584739

Ventricular divergence correlates with epicardial wavebreaks and predicts ventricular arrhythmia in isolated rabbit hearts during therapeutic hypothermia.

Autor: Hsieh, Yu-Cheng^1,2,3 (AUTHOR) ychsieh@vghtc.gov.tw, Hsieh, Wan-Hsin⁴ (AUTHOR), Li, Cheng-Hung^1,2,3 (AUTHOR), Liao, Ying-Chieh^1,2,3 (AUTHOR), Lin, Jiunn-Cherng^1,2,3 (AUTHOR), Weng, Chi-Jen^1,2,3 (AUTHOR), Lo, Men-Tzung⁵ (AUTHOR), Tuan, Ta-Chuan^2,6 (AUTHOR), Lin, Shien-Fong^7,8 (AUTHOR), Yeh, Hung-I⁹ (AUTHOR), Huang, Jin-Long^1,2 (AUTHOR), Haugan, Ketil¹⁰ (AUTHOR), Larsen, Bjarne D.¹¹ (AUTHOR), Lin, Yenn-Jiang^2,6 (AUTHOR), Lin, Wei-Wen^1,12 (AUTHOR), Wu, Tsu-Juey^1,2 (AUTHOR), Chen, Shih-Ann^2,6 (AUTHOR)

Publikováno v: PLoS ONE. 2/21/2020, Vol. 15 Issue 2, p1-19. 19p.

What do we know about housing supply? The case of Hong Kong SAR.

Autor: Leung, Charles Ka Yui¹ (AUTHOR) kycleung@cityu.edu.hk, Ng, Joe Cho Yiu¹ (AUTHOR), Tang, Edward Chi Ho² (AUTHOR)

Publikováno v: Economic & Political Studies. Mar2020, Vol. 8 Issue 1, p6-20. 15p.

Monetary Policy, Residential Investment, and Search Frictions: An Empirical and Theoretical Synthesis.

Autor: Lunsford, Kurt G.¹ kurt.lunsford@clev.frb.org

Publikováno v: Working Paper Series (Federal Reserve Bank of Cleveland). 2/12/2016, Vol. 16 Issue 6/7, preceding p1-40. 41p.