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pro vyhledávání: '"Shan Garcia"'
Publikováno v:
Microelectronic Engineering. 85:734-737
Laser copper plasma sources are a compact, economical means of producing high intensity X-rays at the correct wavelengths for X-ray lithography. Copper debris in the form of vapor, ions, dust, and high speed particles is an unwanted byproduct of the
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::b24ddbef66fdc2f22b1e544587bbf505
https://doi.org/10.1016/j.mee.2007.12.033
https://doi.org/10.1016/j.mee.2007.12.033
