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pro vyhledávání: '"Shan Garcia"'
Publikováno v:
Microelectronic Engineering. 85:734-737
Laser copper plasma sources are a compact, economical means of producing high intensity X-rays at the correct wavelengths for X-ray lithography. Copper debris in the form of vapor, ions, dust, and high speed particles is an unwanted byproduct of the
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::b24ddbef66fdc2f22b1e544587bbf505
https://doi.org/10.1016/j.mee.2007.12.033
https://doi.org/10.1016/j.mee.2007.12.033
Autor:
Crawford, James M.
Publikováno v:
Laboratory Investigation (00236837); Jan2005, Vol. 85 Issue 1, p1-3, 3p
Publikováno v:
Charter. Nov2012, Vol. 83 Issue 10, p79-79. 1p.