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pro vyhledávání: '"Shamas Musthafa Ummer"'
Autor:
Maihan Nguyen, Hyunchul Sagong, Mohammad Shahriar Rahman, Rakesh Ranjan, Ki-Don Lee, Susannah Laure Prater, Minhyo Kang, Caleb Dongkyun Kwon, Ahmed Shariq, Shamas Musthafa Ummer, Charles Briscoe Larow, Pavitra Ramadevi Perepa, Ashish Kumar Jha, Hwa-Sung Rhee, Iqbal Mahmud
Publikováno v:
IRPS
Reliability of Core and IO FinFET is extensively investigated with various process steps at Fin, Source/ Drain, sacrificial Gate-Metal, and High-Pressure D2 Anneal. By modulating the process knobs, we quantified the effect of oxide traps (at bulk or
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::8353026f93a67445c925c2a882169b61
https://doi.org/10.1109/irps46558.2021.9405134
https://doi.org/10.1109/irps46558.2021.9405134
