Výsledky vyhledávání - "Shaharil, Nurhul"

Conformity of aluminum thin films deposited onto micro-patterned silicon wafers by pulsed-laser deposition, magnetron sputtering, and CVD

Autor: Thomann, Anne-Lise, Vahlas, Constantin, Aloui, Lyacine, Samelor, Diane, Caillard, Amaël, Shaharil, Nurhul, Blanc, Romuald, Millon, Eric

Publikováno v: Chemical Vapor Deposition
Chemical Vapor Deposition, Wiley-VCH Verlag, 2011, 17, pp.366

International audience

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=dedup_wf_001::561e793c4d82f2cf3e26535936da9b65
https://hal.archives-ouvertes.fr/hal-00667922

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