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pro vyhledávání: '"Seyun Jo"'
Publikováno v:
Japanese Journal of Applied Physics. 61:SI1013
In atomic layer deposition (ALD), unreacted precursors released from the process chamber can cause agglomeration of powders inside the fore line, exhaust line, and dry pump. Thus, it shortens the preventive maintenance cycle of dry pumps in a high-vo
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::d9e93cd7264302155ce3fabd136e3ae1
https://doi.org/10.35848/1347-4065/ac5fb8
https://doi.org/10.35848/1347-4065/ac5fb8
