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Fabrication and flow rate characterization of a DRIE process based valveless piezoelectric micropump
Publikováno v:
Journal of Micromechanics and Microengineering. 32:065004
Micropumps have become one of the major research topics in the field of microfluidics. Different actuators have been used in active micropumps including piezoelectric ones, which convert electrical energy to mechanical energy. In this study, a piezoe
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::ad95c452fe963270656b2b1f755b64b5
https://doi.org/10.1088/1361-6439/ac69ab
https://doi.org/10.1088/1361-6439/ac69ab
