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pro vyhledávání: '"Seung-Pill Yang"'
Autor:
Ik-Hwan Kwon, Kyeong-Suk Kim, Hye-Joon Ma, Chung Ki Hong, Hyun-Il Jung, Ju-Yeop Shin, Seung-Pill Yang, Hyun-Chul Jung
Publikováno v:
Journal of the Korean Society for Nondestructive Testing. 35:141-149
In the fabrication of electronic circuits used in electronic products, molybdenum thin films are deposited on semiconductors to prevent oxidation. During the deposition, the presence of a particle or dust at the interface between the thin film and su
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::2f6ad40d3c665dd4dfc7a619ac7b8cfb
https://doi.org/10.7779/jksnt.2015.35.2.141
https://doi.org/10.7779/jksnt.2015.35.2.141
