Zobrazeno 1 - 1
of 1
pro vyhledávání: '"Seung Gun Chae"'
Autor:
Chunhee Park, Jongchan Son, Han Young Shin, Seung Gun Chae, Byung Jun Jung, Yu Min Choi, Jin-Kyun Lee
Publikováno v:
Microelectronic Engineering. 227:111324
Orthogonal processing is a photolithographic patterning method using fluorous solvents and highly fluorinated photoresists; it has shown potential as a unique patterning protocol that can form high-resolution structures while minimizing damage to the
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::f6b4ef8e4eb3ab681b62743f4ca19a3b
https://doi.org/10.1016/j.mee.2020.111324
https://doi.org/10.1016/j.mee.2020.111324
