Zobrazeno 1 - 3
of 3
pro vyhledávání: '"Seshadri Rampoori"'
Autor:
Kushlendra Mishra, Rachit Sharma, Ingo Bork, Zhiheng (Mary) Zuo, Mark Pereira, Samir Bhamidipati, Seshadri Rampoori
Publikováno v:
Photomask Technology 2022.
Autor:
Kan Zhou, Qijian Wan, Ao Chen, Wenzhan Zhou, Chunshan Du, Recoo Zhang, Yu Zhang, Wenming Wu, Germain Fenger, Seshadri Rampoori
Publikováno v:
2022 International Workshop on Advanced Patterning Solutions (IWAPS).
Autor:
Bhamidipati Samir, Wenzhan Zhou, Wenming Wu, Kan Zhou, Chunshan Du, Germain Fenger, Recoo Zhang, Ao Chen, Xin Guo, Seshadri Rampoori, Qijian Wan
Publikováno v:
Metrology, Inspection, and Process Control for Semiconductor Manufacturing XXXV.
In this paper, we present the flow and results of contour-based process characterization, modeling and control used for semiconductor manufacturing. First, high-quality contours are extracted from large field of view (FOV) SEM images based on the imp