Zobrazeno 1 - 3
of 3
pro vyhledávání: '"Sergiu Stejar"'
Publikováno v:
Optical Characterization Techniques for High-Performance Microelectronic Device Manufacturing.
A scanning laser computer assisted microscope in which the sample is scanned electromagnetic is used to produce images from semiconductor devices using photo induced current. We obtained 2D and 3D images which were analyzed in connection with current
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::f0e6b9051bd8f59b62c00e27372ddb39
https://doi.org/10.1117/12.186632
https://doi.org/10.1117/12.186632
Publikováno v:
SPIE Proceedings.
Scanning optical microscopy computer assisted has the advantages that a wide range of imaging modes is possible. We have constructed a new computer assisted laser scanning which offers the possibility to obtain 2D and 3D images. The paper presents th
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::415eddb5014fdd701e45a3dfa90482c4
https://doi.org/10.1117/12.172086
https://doi.org/10.1117/12.172086
Conference
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